Precision Lithography

Precision Lithography is the heart of what we do. At Enlitho, we utilize various state-of-the-art systems to provide 2D, 2.5D and 3D micro-nano patterning up to 8” platforms and 250nm resolution critical feature sizes. Your challenge is our mission.

Technology

Up to 9” x 9” square
Min. resolution 250nm
Multilayer alignment 250nm
4096 grayscale lithography
2D, 2.5D micro-nano features
Master-Mould

Nickel Masters

Precision nickel masters for large-area and high resolution manufacturing of biomedical, optical and photonic devices.

Up to 8” diameter
Min. resolution 50nm
Up to 1.5mm thickness
Multi-layer with grayscale
Varying form factors for production

Precision Replication

Providing precision replication techniques such as Enhanced Injection Moulding and Nanoimprint Lithography to manufacture micro-nano devices for advanced applications.

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Our Enhanced Injection Moulding process
supports micro-nanotechnology scale-up
through cost-effective and high throughput
component manufacturing in polymers.

Our UV Nanoimprint Lithography services
enable high-resolution micro-nanostructures
on a variety of surfaces and materials for
multiple application areas.

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System Development

Bespoke systems design, build and integration of customised table-top or full automation systems fully supported by our in-house design, engineering and applications team.

Providing in-house design, build and integration of customised systems supported by our highly trained and experienced engineering and applications team.